Measuring vacuum ultraviolet radiation-induced damage

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1253-1259

  Lauer, J L ^a   Shohet, J L ^a   Hansen, R W ^a,b  

^a University of Wisconsin Madison   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; DIELECTRIC MATERIALS; ENERGY GAP; ION BOMBARDMENT; PHOTOEMISSION; RADIATION DAMAGE; RADIATION EFFECTS; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS;

SURFACE POTENTIAL MEASUREMENT; VACUUM ULTRAVIOLET RADIATION INDUCED DAMAGE;

PLASMA APPLICATIONS;

EID: 0042530525     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1565152     Document Type: Article

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