Novel high-performance TFTs fabricated by selectively enlarging laser x'tallizaion (SELAX) technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5004, Issue , 2003, Pages 36-43

  Yamaguchi, Shinya ^a   Hatano, Mutsuko ^a   Park, Seong Kee ^a   Tai, Mitsuharu ^a   Shiba, Takeo ^a  

^a HITACHI LTD   (Japan)

Author keywords

Crystallization; CW laser; Poly silicon; TFT

Indexed keywords

CONTINUOUS WAVE LASERS; CRYSTAL ORIENTATION; CRYSTALLIZATION; POLYSILICON; SCANNING; SOLID STATE LASERS;

PULSE-LIKE MODULATION;

THIN FILM TRANSISTORS;

EID: 0042360609     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482588     Document Type: Conference Paper

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