Optimization and transformation analysis of grain-boundary-location-controlled Si films

Materials Research Society Symposium - Proceedings

Volumn 397, Issue , 1996, Pages 401-406

  Kim, H J ^a   Im, James S ^a  

^a Howard Hughes Medical Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; FILMS; GRAIN BOUNDARIES; GROWTH (MATERIALS); MICROSTRUCTURE; OPTIMIZATION; PHASE TRANSITIONS; REACTION KINETICS; SURFACE MEASUREMENT;

ARTIFICIALLY CONTROLLED SUPERLATERAL GROWTH; GRAIN BOUNDARY LOCATION CONTROLLED SILICON FILMS; TRANSIENT REFLECTANCE MEASUREMENTS;

SILICON;

EID: 0029746135     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)