Excimer laser annealing system for AMLCDs: A long laser pulse for high-performances, uniform and stable TFT

Proceedings of SPIE- The International Society for Optical Engineering

Volumn 4295, Issue , 2001, Pages 33-37

  Prat, C ^a   Zahorski, D ^a   Helen, Y ^a   Mohammed Brahim, T ^a   Bonnaud, O ^a  

^a SOPRA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; EXCIMER LASERS; GRAIN SIZE AND SHAPE; LASER PULSES; POLYSILICON; THIN FILM TRANSISTORS;

ACTIVE MATRIX LIQUID CRYSTAL DISPLAYS (AMLCD); EXCIMER LASER ANNEALING SYSTEMS;

LIQUID CRYSTAL DISPLAYS;

EID: 0034876957     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.424884     Document Type: Article

References (10)