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Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 1145-1150

Influence of the oxygen flow rate on the properties of reactively sputtered Ti-B-O films

(4) Pierson, J F a Alnot, M b Fagot Revurat, Y b Jolly, J c

a UNIVERSITÉ DE FRANCHE COMTÉ (France)

b CNRS (France)

c ECOLE POLYTECHNIQUE (France)

Author keywords

Metal insulator transition; Nanocomposite coatings; Reactive sputtering

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRONIC DENSITY OF STATES; HARDNESS; NANOSTRUCTURED MATERIALS; PHOTOEMISSION; SPUTTER DEPOSITION; ULTRAVIOLET SPECTROSCOPY;

FLOW RATE;

TITANIUM COMPOUNDS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0041826949 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00567-X Document Type: Article

Times cited : (4)

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