Spontaneous formation of patterns on sputtered surfaces

Scripta Materialia

Volumn 49, Issue 10 SPEC., 2003, Pages 953-959

  Chason, Eric ^a   Aziz, Michael J ^b  

^a Brown University   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

Ion beam processing; Self organization and patterning; Sputtering; Surface structure

Indexed keywords

DIFFUSION; ION BEAMS; PATTERN RECOGNITION; SPUTTERING; SURFACE ROUGHNESS;

SPONTANEOUS FORMATION;

SURFACE STRUCTURE;

EID: 0041821384     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6462(03)00474-3     Document Type: Article

References (34)

1. Martin G., Bellon P. Ehrenreich H., Spaepen F. Solid state physics. vol. 50:1997;189-332 Academic Press, San Diego.
2. Makeev M.A., Cuerno R., Barabasi A.-L. Nucl. Instrum. Meth. B. 197:2002;185.
3. Valbusa U., Boragno C., Buatier de Mongeot F. J. Phys.: Condens. Matter. 14:2002;8153.
4. Murty M.V.R., Curcic T., Judy A., Cooper B.H., Woll A.R., Brock J.D.et al. Phys. Rev. Lett. 80:1998;4713.
5. Mayer T.M., Chason E., Howard A.J. J. Appl. Phys. 76:1994;1633.
6. Erlebacher J., Aziz M.J., Chason E., Sinclair M.B., Floro J.A. Phys. Rev. Lett. 82:1999;2330.
7. Cuenat A, Aziz MJ. In: MRS Symp Proc, vol. 696. 2002. p. N2.8.
8. Bradley R.M., Harper J.M. J. Vac. Sci. Technol. A. 6:1988;2390.
9. Cuerno R., Barabasi A.-L. Phys. Rev. Lett. 74:1995;4746.
10. Sigmund P. J. Mater. Sci. 8:1973;1545 Sigmund P. Phys. Rev. 184:1969;383.
11. Sigmund P. J. Mater. Sci. 8:1973;1545 Sigmund P. Phys. Rev. 184:1969;383.
12. Herring C. Kingston W.E. Physics of powder metallurgy. 1951;McGraw-Hill, New York, Herring C. J. Appl. Phys. 21:1950;301.
13. Herring C. Kingston W.E. Physics of powder metallurgy. 1951;McGraw-Hill, New York, Herring C. J. Appl. Phys. 21:1950;301.
14. Mullins W.W. J. Appl. Phys. 30:1959;77.
15. Jeong H.-C., Williams E.D. Steps on surfaces: experiment and theory. Surf. Sci. Rep. 34:1999;171-294.
16. Erlebacher J.D., Aziz M.J., Chason E., Sinclair M.B., Floro J.A. Phys. Rev. Lett. 84:2000;5800 Israeli N., Kandel D. Phys. Rev. Lett. 88:2002;169601. (comment) Erlebacher J.D., Aziz M.J., Chason E., Sinclair M.B., Floro J.S. Phys. Rev. Lett. 88:2002;169602. (reply).
17. Erlebacher J.D., Aziz M.J., Chason E., Sinclair M.B., Floro J.A. Phys. Rev. Lett. 84:2000;5800 Israeli N., Kandel D. Phys. Rev. Lett. 88:2002;169601. (comment) Erlebacher J.D., Aziz M.J., Chason E., Sinclair M.B., Floro J.S. Phys. Rev. Lett. 88:2002;169602. (reply).
18. Erlebacher J.D., Aziz M.J., Chason E., Sinclair M.B., Floro J.A. Phys. Rev. Lett. 84:2000;5800 Israeli N., Kandel D. Phys. Rev. Lett. 88:2002;169601. (comment) Erlebacher J.D., Aziz M.J., Chason E., Sinclair M.B., Floro J.S. Phys. Rev. Lett. 88:2002;169602. (reply).
19. Makeev M.A., Barbasi A.-L. Appl. Phys. Lett. 71:1997;2800.
20. Park S., Kahng B., Jeong H., Barabasi A.-L. Phys. Rev. Lett. 83:1999;3486.
21. Erlebacher J.D., Aziz M.J., Chason E., Sinclair M.B., Floro J.A. J. Vac. Sci. Technol. A. 18:2000;115.
22. Habenicht S. Phys. Rev. B. 63:2001;125419.
23. Swartzentruber B.S. Phys. Rev. Lett. 76:1996;459-462 Krueger M., Borovsky B., Ganz E. Surf. Sci. 385:1997;146-154.
24. Swartzentruber B.S. Phys. Rev. Lett. 76:1996;459-462 Krueger M., Borovsky B., Ganz E. Surf. Sci. 385:1997;146-154.
25. Vajo J.J., Doty R.E., Cirlin E.-H. J. Vac. Sci. Technol. A. 14:1996;2709.
26. Habenicht S., Bolse W., Lieb K.P., Reimann K., Geyer U. Phys. Rev. B. 60:1999;R2200.
27. Michely T., Comsa G. Nucl. Instrum. Meth. B. 82:1993;207.
28. Rusponi S., Constantini G., Boragno C., Valbusa U. Phys. Rev. Lett. 81:1998;2735.
29. Rusponi S., Constantini G., Boragno C., Valbusa U. Phys. Rev. Lett. 81:1998;4184.
30. van Dijken S., de Bruin D., Poelsema B. Phys. Rev. Lett. 86:2001;4608 Chan WL, Chason E. Unpublished.
31. van Dijken S., de Bruin D., Poelsema B. Phys. Rev. Lett. 86:2001;4608 Chan WL, Chason E. Unpublished.
32. Facsko S., Dekorsy T., Koerdt C., Trappe C., Kurz H., Vogt A.et al. Science. 285:1999;1551.
33. Frost F. Appl. Phys. A. 74:2002;131-133.
34. Habenicht S., Lieb K.P., Koch J., Wieck A.D. Phys. Rev. B. 65:2002;115327-1.