Nonclassical smoothening of nanoscale surface corrugations

Physical Review Letters

Volumn 84, Issue 25, 2000, Pages 5800-5803

  Erlebacher, Jonah ^a   Aziz, Michael J ^a   Chason, Eric ^b   Sinclair, Michael B ^c   Floro, Jerrold A ^c  

^a HARVARD UNIVERSITY   (United States)

^b BROWN UNIVERSITY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOSCALE SURFACE CORRUGATION; NONCLASSICAL MORPHOLOGY EQUILIBRATION; PERIODIC RIPPLED STRUCTURES; RIPPLE AMPLITUDE; SPUTTER RIPPLING;

ACTIVATION ENERGY; ANNEALING; APPROXIMATION THEORY; ARGON; ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; ION BOMBARDMENT; MORPHOLOGY; RELAXATION PROCESSES; SURFACES; TEMPERATURE; ULTRAVIOLET SPECTROSCOPY;

SILICON;

EID: 17544379256     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevLett.84.5800     Document Type: Article

References (7)

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