Growth and nanostructure of conformai ruthenium films by liquid-source metalorganic chemical vapor deposition

Journal of Applied Physics

Volumn 94, Issue 1, 2003, Pages 774-777

  Dey, S K ^a   Goswami, J ^a   Das, A ^a   Cao, W ^a   Floyd, M ^a   Carpenter, R ^a  

^a Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; OXYGEN; POLYCRYSTALLINE MATERIALS; PYROLYSIS; RUTHENIUM; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

GRAIN STRUCTURE;

METALLIC FILMS;

EID: 0041339833     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1576513     Document Type: Article

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