Dominated energy dissipation in ultrathin single crystal silicon cantilever: Surface loss

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 235-240

  Yang, Jinling ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ENERGY DISSIPATION; Q FACTOR MEASUREMENT; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SILICON NITRIDE; SINGLE CRYSTALS; SURFACE STRUCTURE; SURFACE TREATMENT; ULTRATHIN FILMS; VACUUM APPLICATIONS;

CANTILEVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033727391     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)