Interferometric at-wavelength flare characterization of extreme ultraviolet optical systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2987-2991

  Naulleau, Patrick ^a   Goldberg, Kenneth A ^a   Gullikson, Eric M ^a   Bokor, Jeffrey ^a,b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040708643     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590940     Document Type: Article

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