SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3435-3439

High-accuracy interferometry of extreme ultraviolet lithographic optical systems

(7) Goldberg, Kenneth A a Naulleau, Patrick a Lee, Sang b Bresloff, Cynthia a Henderson, Craig c Attwood, David b Bokor, Jeffrey b

a LAWRENCE BERKELEY NATIONAL LABORATORY (United States)

b UNIVERSITY OF CALIFORNIA (United States)

c SANDIA NATIONAL LABORATORIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005677105 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.590498 Document Type: Article

Times cited : (7)

References (13)

1
- 0001856641
- Optical Society of America, Washington, DC
- D. M. Williamson, in OSA Proceedings on Extreme Ultraviolet Lithography (Optical Society of America, Washington, DC, 1994), Vol. 23, pp. 68-76.
- (1994) OSA Proceedings on Extreme Ultraviolet Lithography , vol.23 , pp. 68-76
- Williamson, D.M.¹

2
- 0001582350
- K. A. Goldberg, E. Tejnil, S. H. Lee, H. Medecki, D. T. Attwood, K. H. Jackson, and J. Bokor, Proc. SPIE 3048, 264 (1997).
- (1997) Proc. SPIE , vol.3048 , pp. 264
- Goldberg, K.A.¹ Tejnil, E.² Lee, S.H.³ Medecki, H.⁴ Attwood, D.T.⁵ Jackson, K.H.⁶ Bokor, J.⁷

3
- 0001731566
- E. Tejnil et al., J. Vac. Sci. Technol. B 15, 2455 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2455
- Tejnil, E.¹

4
- 18544383957
- J. Goldsmith et al., Proc. SPIE 3331, 11 (1998).
- (1998) Proc. SPIE , vol.3331 , pp. 11
- Goldsmith, J.¹

5
- 0032402532
- D. Sweeney, R. Hudyma, H. N. Chapman, and D. Shafer, Proc. SPIE 3331, 2 (1998).
- (1998) Proc. SPIE , vol.3331 , pp. 2
- Sweeney, D.¹ Hudyma, R.² Chapman, H.N.³ Shafer, D.⁴

6
- 0030257954
- H. Medecki, E. Tejnil, K. A. Goldberg, and J. Bokor, Opt. Lett. 21, 1526 (1996).
- (1996) Opt. Lett. , vol.21 , pp. 1526
- Medecki, H.¹ Tejnil, E.² Goldberg, K.A.³ Bokor, J.⁴

7
- 0002039216
- edited by A. M. Hawryluk and R. H. Stulen Optical Society of America, Washington, DC
- D. Tichenor et al., in OSA Proceedings on Soft X-Ray Projection Lithography, edited by A. M. Hawryluk and R. H. Stulen (Optical Society of America, Washington, DC, 1993), Vol. 18, pp. 79-82.
- (1993) OSA Proceedings on Soft X-Ray Projection Lithography , vol.18 , pp. 79-82
- Tichenor, D.¹

8
- 0032401461
- P. Naulleau, K. A. Goldberg, S. H. Lee, C. Chang, C. Bresloff, P. Batson, D. Attwood, and J. Bokor, Proc. SPIE 3331, 114 (1998).
- (1998) Proc. SPIE , vol.3331 , pp. 114
- Naulleau, P.¹ Goldberg, K.A.² Lee, S.H.³ Chang, C.⁴ Bresloff, C.⁵ Batson, P.⁶ Attwood, D.⁷ Bokor, J.⁸

9
- 0037567243
- R. Beguiristain, J. Underwood, M. Koike, B. Batson, E. Gullickson, K. Jackson, H. Medecki, and D. Attwood, Proc. SPIE 2855, 159 (1997).
- (1997) Proc. SPIE , vol.2855 , pp. 159
- Beguiristain, R.¹ Underwood, J.² Koike, M.³ Batson, B.⁴ Gullickson, E.⁵ Jackson, K.⁶ Medecki, H.⁷ Attwood, D.⁸

10
- 0027850133
- D. Attwood, G. Sommargren, R. Beguiristain, K. Nguyen, J. Bokor, N. Ceglio, K. Jackson, M. Koike, and J. Underwood, Appl. Opt. 32, 7022 (1993).
- (1993) Appl. Opt. , vol.32 , pp. 7022
- Attwood, D.¹ Sommargren, G.² Beguiristain, R.³ Nguyen, K.⁴ Bokor, J.⁵ Ceglio, N.⁶ Jackson, K.⁷ Koike, M.⁸ Underwood, J.⁹

11
- 0000494360
- E. Anderson, V. Voegli, and L. Murray, J. Vac. Sci. Technol. B 13, 2529 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 2529
- Anderson, E.¹ Voegli, V.² Murray, L.³

12
- 11744298606
- Ph.D. dissertation, University of California, Berkeley
- K. A. Goldberg, Ph.D. dissertation, University of California, Berkeley, 1997.
- (1997)
- Goldberg, K.A.¹

13
- 0032401486
- C. Henderson, D. Wheeler, T. Pollagi, D. O'Connell, J. Goldsmith, A. Fisher, G. Cardinale, J. Hutchinson, and V. Rao, Proc. SPIE 3331, 32 (1998).
- (1998) Proc. SPIE , vol.3331 , pp. 32
- Henderson, C.¹ Wheeler, D.² Pollagi, T.³ O'Connell, D.⁴ Goldsmith, J.⁵ Fisher, A.⁶ Cardinale, G.⁷ Hutchinson, J.⁸ Rao, V.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.