Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions

IEEE Journal of Quantum Electronics

Volumn 35, Issue 5, 1999, Pages 709-719

  Attwood, David T ^{a,b,e,f,g,h,i}   Naulleau, Patrick ^a,j,k   Goldberg, Kenneth A ^a,i   Tejnil, Edita ^b,c   Chang, Chang ^a,b   Beguiristain, Raul ^a   Batson, Phillip ^a   Bokor, Jeffrey ^a,b   Gullikson, Eric M ^a   Koike, Masato ^d   Medecki, Hector ^a   Underwood, James H ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c INTEL CORPORATION   (United States)

^d JAPAN ATOMIC ENERGY AGENCY   (Japan)

^e HOFSTRA UNIVERSITY   (United States)

^f NORTHWESTERN UNIVERSITY   (United States)

^g NEW YORK UNIVERSITY   (United States)

^h LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

ⁱ UNIVERSITY OF CALIFORNIA   (United States)

^j ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

^k UNIVERSITY OF MICHIGAN   (United States)

more..

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; INTERFEROMETRY; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION; X RAY PRODUCTION;

EXTREME ULTRAVIOLET (EUV); SOFT X-RAYS (SXR); UNDULATORS;

PHOTOLITHOGRAPHY;

EID: 0032625024     PISSN: 00189197     EISSN: None     Source Type: Journal    
DOI: 10.1109/3.760317     Document Type: Article

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