Dual-domain point diffraction interferometer

Applied Optics

Volumn 38, Issue 16, 1999, Pages 3523-3533

  Naulleau, Patrick P ^a   Goldberg, Kenneth A ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; FOURIER TRANSFORMS; FREQUENCY DOMAIN ANALYSIS; LIGHT SCATTERING; PHOTOLITHOGRAPHY; SPURIOUS SIGNAL NOISE;

PHASE-SHIFTING POINT DIFFRACTION INTERFEROMETERS (PSPDI);

INTERFEROMETERS;

EID: 0032607653     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.003523     Document Type: Article

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