SCOPUS 정보 검색 플랫폼

Volumn 657, Issue , 2001, Pages

On the fracture toughness of polysilicon MEMS structures

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FRACTURE TOUGHNESS; MECHANICAL PROPERTIES; MICROMACHINING; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; POLYSILICON;

ELECTROSTATIC ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035557594 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (11)

References (22)

1
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- Microelectromechanical Structures for Materials Research, ed. by S. Brown, J. Gilbert, H. Guckel, R. Howe, G. Johnson, P. Krulevitch, and C. Muhlstein (Warrendale, PA)
- (1998) Mater. Res. Soc. Proc. , vol.518 , pp. 57-65
- Sharpe, W.N.¹ Brown, S.² Johnson, G.C.³ Knauss, W.⁴

3
- 0034514777
- Materials Science of Microelectromechanical Systems (MEMS) Devices 11, ed. By M.P. de Boer, A.H. Heuer, S.J. Jacobs, and E. Peeters (Warrendale, PA)
- (2000) Mater. Res. Soc. Proc. , vol.605 , pp. 19-24
- LaVan, D.A.¹ Buchheit, T.E.²

4
- 0000416997
- (1990) J. Appl. Phys. , vol.68 , pp. 5840-5844
- Ericson, F.¹ Schweitz, J.-A.²

13
- 0032292384
- Microelectromechanical Structures for Materials Research, ed. by S. Brown, J. Gilbert, H. Guckel, R. Howe, G. Johnson, P. Krulevitch, and C. Muhlstein (Warrendale, PA)
- (1998) Mater. Res. Soc. Proc. , vol.518 , pp. 197-202
- Jones, P.T.¹ Johnson, G.C.² Howe, R.T.³

17
- 0031631279
- Thin-films: stresses and mechanical properties VII, ed. by R.C. Cammarata, M. Natasi, E.P. Busso, and W.C. Oliver (Warrendale, PA)
- (1998) Mater. Res. Soc. Proc. , vol.505 , pp. 285-290
- Tsuchiya, T.¹ Sakata, J.² Taga, Y.³

18
- 0034498419
- Materials Science of Microelectromechanical Systems (MEMS) Devices II, ed. By M.P. de Boer, A.H. Heuer, S.J. Jacobs, and E. Peeters (Warrendale, PA)
- (2000) Mater. Res. Soc. Proc. , vol.605 , pp. 25-30
- Kahn, H.¹ Tayebi, N.² Ballarini, R.³ Mullen, R.L.⁴ Heuer, A.H.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.