CMOS MEMS technology and CAD: The case of thermal microtransducers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3328, Issue , 1998, Pages 2-12

  Baltes, Henry ^a   Brand, Oliver ^a   Paul, Oliver ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Chemical sensor; CMOS microsensor; Flow sensor; Infrared sensor; Micromachining; Position sensor; Thermal CMOS material properties; Thermal sensor

Indexed keywords

CHEMICAL PROPERTIES; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; CONCRETE BRIDGES; ELECTRIC BATTERIES; INFRARED DETECTORS; INFRARED DEVICES; INTELLIGENT STRUCTURES; MACHINING; MATERIALS; MATERIALS PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; NANOSENSORS; PUMPS;

CHEMICAL SENSOR; CMOS MICROSENSOR; FLOW SENSOR; INFRARED SENSOR; POSITION SENSOR; THERMAL CMOS MATERIAL PROPERTIES; THERMAL SENSOR;

SENSORS;

EID: 0038705686     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.320157     Document Type: Conference Paper

References (17)

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3. D. Jaeggi, Thermal Converters by CMOS Technology, Ph.D. Thesis no. 11567, ETH Zurich, Switzerland, 1996.
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8. O. Brand and H. Baltes, "Micromachined resonant sensors: an overview," Sensors Update, vol. 4, Weinheim: VCH-Wiley, 1998, in press.
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