Radiative properties of semitransparent silicon wafers with rough surfaces

Journal of Heat Transfer

Volumn 125, Issue 3, 2003, Pages 462-470

  Zhou, Y H ^a   Zhang, Z M ^b  

^a UNIVERSITY OF FLORIDA   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Heat transfer; Microstructures; Monte Carlo; Properties; Radiation; Roughness

Indexed keywords

COMPUTER SIMULATION; DIAMOND FILMS; SURFACE ROUGHNESS; TEMPERATURE MEASUREMENT;

RAPID THERMAL PROCESSING (RTP);

SILICON WAFERS;

HEAT TRANSFER; MICROSTRUCTURE; MONTE CARLO SIMULATION; RADIATION; SILICON; SURFACE ROUGHNESS;

EID: 0038682836     PISSN: 00221481     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1565089     Document Type: Article

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