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Volumn , Issue , 2001, Pages 179-188

Effects of radiative properties of surfaces on radiometric temperature measurement

Author keywords

BRDF; effective emissivity; Monte Carlo method; radiometric temperature measurement; rapid thermal processing

Indexed keywords

ANGULAR DISTRIBUTION; DISTRIBUTION FUNCTIONS; ELECTROMAGNETIC WAVE EMISSION; HEAT TREATMENT; RADIOMETRY; RAPID THERMAL PROCESSING; SURFACE ROUGHNESS; TEMPERATURE MEASUREMENT;

EID: 84983146125     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RTP.2001.1013764     Document Type: Conference Paper
Times cited : (9)

References (20)
  • 2
  • 3
    • 0347774927 scopus 로고    scopus 로고
    • ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling
    • B.K. Tsai and D.P. DeWitt, "ITS-90 Calibration of Radiometers Using Wire/Thin-Film Thermocouples in the NIST RTP Tool: Effective Emissivity Modeling," in Proc. 7th Int. Conf. Advanced Thermal Processing of Semicond. - RTP'99 (1999), p. 125.
    • (1999) Proc. 7th Int. Conf. Advanced Thermal Processing of Semicond. - RTP'99 , pp. 125
    • Tsai, B.K.1    DeWitt, D.P.2
  • 4
    • 0006475517 scopus 로고    scopus 로고
    • An Effective Emissivity Model for Rapid Thermal Processing Using the Net-Radiation Method
    • accepted for publication
    • Z.M. Zhang and Y.H. Zhou, "An Effective Emissivity Model for Rapid Thermal Processing Using the Net-Radiation Method," accepted for publication in International Journal of Thermophysics (2001).
    • (2001) International Journal of Thermophysics
    • Zhang, Z.M.1    Zhou, Y.H.2
  • 6
    • 84983187722 scopus 로고    scopus 로고
    • A Monte Carlo Model for Predicting the Effective Emissivity of the Silicon Wafer in Rapid Thermal Processing Furnaces
    • accepted for publication
    • Y.H. Zhou, Y.J. Shen, Z.M. Zhang, B.K. Tsai, and D.P. DeWitt, "A Monte Carlo Model for Predicting the Effective Emissivity of the Silicon Wafer in Rapid Thermal Processing Furnaces," accepted for publication in Int. J. Heat Mass Transfer (2001).
    • (2001) Int. J. Heat Mass Transfer
    • Zhou, Y.H.1    Shen, Y.J.2    Zhang, Z.M.3    Tsai, B.K.4    DeWitt, D.P.5
  • 7
    • 5744246881 scopus 로고    scopus 로고
    • Determining the Uncertainty of Wafer Temperature Measurements Induced by Variations in the Optical Properties of Common Semiconductor Materials
    • B. Adams, A. Hunter, M. Yam, and B. Peuse, "Determining the Uncertainty of Wafer Temperature Measurements Induced by Variations in the Optical Properties of Common Semiconductor Materials," in Proc. 197th ECS Meeting (2000), p. 363.
    • (2000) Proc. 197th ECS Meeting , pp. 363
    • Adams, B.1    Hunter, A.2    Yam, M.3    Peuse, B.4
  • 9
    • 0000835712 scopus 로고
    • The Reflection of Electromagnetic Waves from a Rough Surface
    • H. Davies, "The Reflection of Electromagnetic Waves from a Rough Surface," in Proc. IEE, vol. 101 (1954), p. 209.
    • (1954) Proc. IEE , vol.101 , pp. 209
    • Davies, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.