Promoting secondary nucleation using methane modulations during diamond chemical vapor deposition to produce smoother, harder, and better quality films

Journal of Materials Research

Volumn 18, Issue 2, 2003, Pages 296-304

  Ali, N ^a   Neto, V F ^a   Gracio, J ^a  

^a UNIVERSITY OF AVEIRO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; METHANE; NUCLEATION; SUBSTRATES;

MICROWAVE PLASMA;

DIAMOND FILMS;

EID: 0038676250     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2003.0041     Document Type: Article

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