Low roughness diamond films produced at temperatures less than 600 °C

Diamond and Related Materials

Volumn 9, Issue 12, 2000, Pages 1965-1970

  Silva, F ^a   Gicquel, A ^a   Chiron, A ^a   Achard, J ^a  

^a UNIVERSITÉ PARIS 13   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; GOLD; METHANE; NUCLEATION; SURFACE ROUGHNESS;

LOW TEMPERATURE DEPOSITION;

DIAMOND FILMS;

EID: 0034544943     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00347-2     Document Type: Article

References (20)

1. B Lux R Haubner Diamond Films and Coatings, Ed. R.F. Davis 1993 Noyes Publications Park Ridge, New Jersey, U.S.A 183 234
2. A. Gicquel, J. Achard, F. Silva, in proceedings of CIP'99, 12° Intern. Colloqium on plasma processes, Antibes, France, editor SFV, (1999) p 79–89.
3. J Karner M Pedrazzini I Reineck M.E Sjöstrand E Bergmann Mater. Sci. Eng. A 209 1996 405 413
4. N.D. Drory, Appl. of Diamond Films and Related Mater.: Third international conference, Gaithersburg, 1995 (NIST), 313–320.
5. A Ababou B Carriere G Goetz J Guille B Marcus M Mermoux A Mosser M Romeo F Le Normand Diamond and Related Mater. 1 1992 875 881
6. R Haubner A Lindlbauer B Lux Diamond and Related Mater. 2 1993 1505 1515
7. S.A Solin A.K Ramdas Phys. Rev. B1 1970 1687 1698
8. P Vandenabeele K Max J of appl phys. 72 1992 5867 5875
9. A. Van der Drift, ‘Evolutionary selection, a principle governing growth orientation in vapor-deposited layers,’ Philips Res. Reports No. R626 (1967).
10. C Wild P Koild W Müller-Sebert H Walcher R Kohl N Herres R Locher R Samlenski R Brenn Diamond and Related Mater. 2 1993 159
11. C Wild R Kohl N Herres W Müller-Sebert P Koidl Diamond and Related Mater. 3 1994 373 381
12. M.A Tamor M.P Everson J. Mater. Res. 9 1994 1839 1848
13. J.W. Lindsay, H. Han, S.L. Girshick, in 12th Int. Symp. on Plasma Chem., Minnesota, 1995. 2023–2029.
14. F Silva A Gicquel A Tardieu P Clëdat T Chauveau Diamond and Related Mater. 5 1996 338 344
15. A. Gicquel, K. Hassouni, F. Silva, J. Electrochem. Soc. 14716 (2000) p 2218–2226.
16. W. Zhu, A.R. Badzian, R. Messier, in Diamond Opt. 111, San Diego, California, 1990 (SPIE. The Int. Soc. for Opt. Eng.), 187–201.
17. K Miyata K Kumagai K Nishimura K Kobashi Diamond and Related Mater. 1 1992 392 396
18. E. Anger, Ph.D Thesis, Université Paris 13, Villetaneuse, France, 1994.
19. J.C Angus M Sunkara S.R Sahaida J.T Glass J. Mater. Res. 7 1992 3001 3009
20. D Shechtman J.L Hutchison L.H Robins E.N Farabaugh A Feldman J. Mater. Res. 8 1993 473 479