Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition: A different regime of growth

Applied Physics Letters

Volumn 77, Issue 26, 2000, Pages 4304-4306

  Sharda, T ^a   Umeno, M ^a   Soga, T ^a   Jimbo, T ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000908191     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1333399     Document Type: Article

References (21)

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