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Thin Solid Films

Volumn 315, Issue 1-2, 1998, Pages 35-39

Bias enhanced nucleation and bias textured growth of diamond on silicon(100) in hot filament chemical vapor deposition

(4) Huang, J T a Yeh, W Y a Hwang, J a Chang, H a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

Bias growth; Bias nucleation; Diamond film

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; CRYSTAL ORIENTATION; NUCLEATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING DIAMONDS; SEMICONDUCTING SILICON; TEXTURES;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0032473317 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00474-4 Document Type: Article

Times cited : (26)

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