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Volumn 253, Issue 1-4, 2003, Pages 64-70
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High-quality GaN/Si(1 1 1) epitaxial layers grown with various Al0.3Ga0.7N/GaN superlattices as intermediate layer by MOCVD
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Author keywords
A3. Metalorganic chemical vapor deposition; B1. AlGaN GaN superlattice; B1. GaN Si(1 1 1)
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Indexed keywords
EPITAXIAL GROWTH;
LIGHT EMITTING DIODES;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
PHOTOLUMINESCENCE;
X RAY DIFFRACTION ANALYSIS;
CRYSTAL QUALITY;
SEMICONDUCTING GALLIUM COMPOUNDS;
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EID: 0038286324
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(03)01015-7 Document Type: Article |
Times cited : (62)
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References (15)
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