Synthesis of crystalline silicon nanoparticles in low-pressure inductive plasmas

Materials Research Society Symposium - Proceedings

Volumn 737, Issue , 2003, Pages 301-306

  Bapat, Ameya ^a   Kortshagen, Uwe ^a   Campbell, Stephen A ^a   Perrey, Christopher R ^a   Carter, C Barry ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRON ENERGY LEVELS; ELECTRON MICROSCOPY; ELECTRON SCATTERING; NANOSTRUCTURED MATERIALS; PLASMAS; PRESSURE EFFECTS; SYNTHESIS (CHEMICAL); THIN FILM TRANSISTORS;

DEFECT RECOMBINATION; DEFECT SCATTERING; LOW PRESSURE INDUCTIVE PLASMAS;

SEMICONDUCTING SILICON;

EID: 0038149591     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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