Global visualization of powder trapping in capacitive RF plasmas by two-dimensional laser scattering

IEEE Transactions on Plasma Science

Volumn 24, Issue 1, 1996, Pages 101-102

  Dorier, J L ^a   Hollenstein, C ^a   Howling, A A ^a   Courteille, C ^a   Schwarzenbach, W ^a   Merad, A ^a   Boeuf, J P ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CAMERAS; ELECTRIC DISCHARGES; LASER APPLICATIONS; LASER BEAMS; LIGHT SCATTERING; PARTICLES (PARTICULATE MATTER); PLASMA SIMULATION; VISUALIZATION;

GLOBAL VISUALIZATION; PLASMA EQUIPOTENTIALS; POWDER TRAPPINGS; POWER CLOUD DISPLACEMENT; SCATTERED INTENSITY;

LASER PRODUCED PLASMAS;

EID: 0030087082     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.491732     Document Type: Article

References (8)

1. G. S. Selwyn, The unconventional nature of particles, Semiconduct. Int., vol. 16, p. 72, Mar. 1993.
2. NATO advanced research workshop on formation, transport and consequences of particles in plasmas, Plasma Sources Sci. Technol, vol. 3. pp. 239-451, 1994.
3. J. E. Daugherty and D. B. Graves, Derivation and experimental verification of a participate transport model for a glow discharge, J. Appl. Phys., vol. 78, no. 4, p. 2279, 1995.
4. J. Perrin, P. Molinas Mata, and P. Belenguer, Ion drag and plasma-induced thermophoresis on particles in RF glow discharge, J. Phys. D: Appl. Phys., vol. 27, p. 2499, 1994.
5. [51 J. P. Boeuf and L. C. Pitchford, Two-dimensional model of a capacitively coupled RF discharge and comparisons with experiments in the GEC reference reactor, Phys. Rev. E, vol. 51, p. 1376, 1995.
6. J.-L. Dorier, C. Hollenstein, and A. A. Howling, Spatiotemporal powder formation and trapping in RF silane plasmas using two-dimensional polarization-sensitive laser scattering, J. Vacuum Sci. Technol. A, vol. 13, p. 918, 1995.
7. H. Ikesi, Coulomb solid of small particles in plasmas, Phys. Fluids, vol. 29, p. 1764, 1986.
8. M. Dalvie et al., Detection and modelling of electrode topography effects on particle traps, Plasma Sources Sci. Technol., vol. 3, p. 442, 1994.