The effect of titanium on Al-Ti contacts to p-type 4H-SiC

Solid-State Electronics

Volumn 47, Issue 9, 2003, Pages 1437-1441

  Johnson, Brian J ^a   Capano, Michael A ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

4H; AFM; Aluminum; Contacts; SEM; SiC; Silicon carbide; Titanium

Indexed keywords

ALUMINUM; ANNEALING; ATOMIC FORCE MICROSCOPY; OHMIC CONTACTS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE;

SHEET RESISTANCE; SPECIFIC CONTACT RESISTANCE;

TITANIUM;

EID: 0038070263     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00097-2     Document Type: Article

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