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Volumn 640, Issue , 2001, Pages
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Engineering the Al-Ti/p-SiC Ohmic contact for improved performance
a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
COMPOSITION EFFECTS;
METALLIZING;
OHMIC CONTACTS;
SURFACE ROUGHNESS;
THERMAL EFFECTS;
SPECIFIC CONTACT RESISTANCE;
SPIKING;
SILICON CARBIDE;
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EID: 0034873060
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (14)
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