FIB-TEM characterization of locally restricted implantation damage

Materials Research Society Symposium - Proceedings

Volumn 738, Issue , 2003, Pages 57-62

  Wanzenboeck, Heinz D ^a   Harasek, Stefan ^a   Brezna, Wolfgang ^a   Lugstein, Alois ^a   Langfischer, Helmut ^a   Bertagnolli, Emmerich ^a   Grabner, Ulf ^a   Hammer, Gerald ^a   Pongratz, Peter ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; IMAGE ANALYSIS; IMAGE QUALITY; ION BEAMS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAMS (FIB);

NANOSTRUCTURED MATERIALS;

EID: 0037973572     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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