Detailed investigation of SEM-results by TEM at one sample using FIB-technique

Microelectronics Reliability

Volumn 38, Issue 6-8, 1998, Pages 895-899

  Muhle U ^a   Wiesner, A ^a   Schray, S ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROPROCESSOR CHIPS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

BITLINE SHORTS;

INTEGRATED CIRCUIT TESTING;

EID: 0032083840     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00147-4     Document Type: Article

References (1)

1. Fuchs, E.; Oppholzer, H.; Rehme, H.: Particle Beam Microanalysis, Fundamentals, Methods and Applications; VCH Verlagsgesellschaft Weinheim mbH; 1990