Sol-gel deposition of PZT thin films on ceramic ZrO2 substrates

IEEE International Symposium on Applications of Ferroelectrics

Volumn 2, Issue , 1996, Pages 611-614

  Brooks, K G ^a   Kohli, M ^a   Taylor, D V ^a   Maeder, T ^a   Reaney, I ^a   Kholkin, A ^a   Muralt, P ^a   Setter, N ^a  

^a Ecl Polytech Federale Lausanne   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTAL ORIENTATION; PYROELECTRICITY; SOL-GELS; SUBSTRATES; THERMAL EXPANSION; THERMAL STRESS; THIN FILMS; ZIRCONIA;

LEAD ZIRCONATE TITANATE (PZT);

PIEZOELECTRIC MATERIALS;

EID: 0030359929     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)