The VAMP - A new device for handling liquids or gases

Sensors and Actuators, A: Physical

Volumn 57, Issue 2, 1996, Pages 153-157

  Stehr, M ^a   Messner, S ^a   Sandmaier, H ^a   Zengerle, R ^a  

^a Hahn Schickard Gesellschaft   (Germany)

Author keywords

Actuators; Microelectromechanical systems (MEMS); Microfluidics; Micropumps; Microvalves; Pumps

Indexed keywords

ACTUATORS; FLOW CONTROL; FLOW MEASUREMENT; FLOW OF FLUIDS; PUMPS; VALVES (MECHANICAL);

MICROFLUIDS; MICROVALVES; VALVE AND MICROPUMP (VAMP);

MICROELECTROMECHANICAL DEVICES;

EID: 0030283105     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80106-9     Document Type: Article

References (14)

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12. M. Stehr, Fluidpumpe, German and international patents pending.
13. R. Zengerle, M. Stehr and S. Messner, Fluidpumpe, German and international patents pending.
14. J. Ulrich, M. Stehr and R. Zengerle, Simulation of a bidirectional pumping microvalve using FEM, accepted for publication in Proc. Eurosensors '96, Leuven, Belgium.