Bonding of polymer microstructures by UV irradiation and welding at low temperatures

DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Volumn , Issue , 2003, Pages 265-267

  Truckenmuller R ^a   Henzi, P ^a   Herrmann, D ^a   Saile, V ^a   Schomburg, W K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Bonding processes; Gratings; Microchannel; Microstructure; Polymers; Solvents; Temperature; Thermal degradation; Thermal loading; Welding

Indexed keywords

EID: 84945915736     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DTIP.2003.1287049     Document Type: Conference Paper

References (3)

1. H.H.G. Jellinek, Aspects of Degradation and Stabilization of Polymers, Elsevier, Amsterdam, 1978.
2. N. Grassie and G. Scott, Polymer Degradation and Stabilization, Cambridge Univ. Pr., Cambridge, 1988.
3. J.O. Choi, J.A. Moore, J.C. Corelli, J.P. Silverman and H. Bakhru, "Degradation of Poly(Methylmethacrylate) by Deep Ultraviolet, X-Ray, Electron Beam, and Proton Beam Irradiations", J. Vac. Sci. Technol. B (6) 6, pp. 2286-2289, Nov. /Dec. 1988.