Global analysis of a small Czochralski furnace with rotating crystal and crucible

Journal of Crystal Growth

Volumn 255, Issue 1-2, 2003, Pages 81-92

  Li, You Rong ^a,b   Akiyama, Yasunobu ^a   Imaishi, Nobuyuki ^a   Tsukada, Takao ^c  

^a KYUSHU UNIVERSITY   (Japan)

^b CHONGQING UNIVERSITY   (China)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

A1. Computer simulation; A1. Fluid flows; A1. Heat transfer; A1. Mass transfer; A2. Czochralski method; B1. Semiconducting silicon

Indexed keywords

CRUCIBLE FURNACES; FLOW OF FLUIDS; HEAT TRANSFER; INTERFACES (MATERIALS); MASS TRANSFER; MATHEMATICAL MODELS; OXYGEN; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SURFACE TENSION; THERMAL EFFECTS;

THERMOCAPILLARY FORCES;

CRYSTAL GROWTH FROM MELT;

EID: 0037702874     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(03)01239-9     Document Type: Article

References (23)

1. Kobayashi N. J. Crystal Growth. 108:1991;240.
2. Sabhapathy P., Salcudean M.E. J. Crystal Growth. 113:1991;164.
3. Hirata H., Hoshikawa K. J. Crystal Growth. 125:1992;181.
4. Xiao Q., Derby J.J. J. Crystal Growth. 129:1993;593.
5. Kinney T.A., Brown R.A. J. Crystal Growth. 132:1993;551.
6. Kakimoto K., Yi K.W., Eguchi M. J. Crystal Growth. 163:1996;238.
7. Yi K.W., Kakimoto K., Eguchi M., Noguchi H. J. Crystal Growth. 165:1996;358.
8. Lipchin A., Brown R.A. J. Crystal Growth. 205:1999;71.
9. Watanabe M., Yi K.M., Hibiya T., Kakimoto K. Prog. Crystal Growth and Charact. 38:1999;215.
10. Kim J.S., Lee T.Y. J. Crystal Growth. 209:2000;55.
11. Kakimoto K., Ozoe H. J. Crystal Growth. 212:2000;429.
12. Basu B., Enger S., Breuer M., Durst F. J. Crystal Growth. 219:2001;123.
13. Enger S., Grabner D., Muller G., Breuer M., Durst F. J. Crystal Growth. 230:2001;135.
14. Vizman D., Grabner O., Muller G. J. Crystal Growth. 233:2001;687.
15. Kakimoto K., Watanabe M., Eguchi M., Hibiya T. Int. J. Heat Mass Transfer. 35:1992;2551.
16. Kanda I., Suzuki T., Kojima K. J. Crystal Growth. 166:1996;669.
17. Machida N., Suzuki Y., Abe K., Ono N., Kida M., Shimizu Y. J. Crystal Growth. 186:1998;362.
18. Li M.W., Li Y.R., Imaishi N., Tsukada T. J. Crystal Growth. 234:2002;32.
19. Tsukada T., Imaishi N., Hozawa M., Fujinawa K. J. Chem. Eng. Jpn. 20:1987;146.
20. Tsukada T., Imaishi N., Hozawa M. J. Chem. Eng. Jpn. 21:1988;381.
21. Okada K., Ozoe H. J. Heat Transfer. 114:1992;107.
22. Kakimoto K., Eguchi M., Watanabe H., Hibiya T. J. Crystal Growth. 88:1988;365.
23. Imaishi N., Kakimoto K. Annu. Rev. Heat Transfer. 12:2002;187.