Global simulation of a silicon Czochralski furnace

Journal of Crystal Growth

Volumn 234, Issue 1, 2002, Pages 32-46

  Li, Mingwei ^a   Li, Yourong ^a   Imaishi, Nobuyuki ^a   Tsukada, Takao ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

A1. Computer simulation; A1. Fluid flows; A1. Heat transfer; A1. Mass transfer; A2. Czochralski method; B2. Semiconducting silicon

Indexed keywords

COMPUTER SIMULATION; CRUCIBLE FURNACES; FLOW PATTERNS; HEAT CONDUCTION; LAMINAR FLOW; MASS TRANSFER; NAVIER STOKES EQUATIONS; PHASE EQUILIBRIA; SEGREGATION (METALLOGRAPHY); SEMICONDUCTING SILICON; SINGLE CRYSTALS;

GLOBAL SIMULATIONS;

CRYSTAL GROWTH FROM MELT;

EID: 0036131049     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)01634-7     Document Type: Article

References (18)