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Volumn 434, Issue 1-2, 2003, Pages 24-29
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Influence of substrate properties on the growth of titanium films: Part IV
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Author keywords
Aluminium monolayers; Amorphous aluminium oxide; Thin film stress; Titanium films
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Indexed keywords
ALUMINA;
MONOLAYERS;
TITANIUM;
TRANSMISSION ELECTRON MICROSCOPY;
ULTRAHIGH VACUUM;
GROWTH STRESS;
THIN FILMS;
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EID: 0037601741
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(03)00529-7 Document Type: Article |
Times cited : (10)
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References (33)
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