A MEMS ultrasonic transducer for monitoring of steel structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4696, Issue , 2002, Pages 256-264

  Jain, Akash ^a   Greve, David W ^a   Oppenheim, Irving J ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Capacitive transducer; Diaphragm; MEMS; Phased array; Ultrasonics

Indexed keywords

CRACK PROPAGATION; DIAPHRAGMS; ELECTRIC POTENTIAL; FAILURE (MECHANICAL); MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; POLYSILICON; SIGNAL PROCESSING; ULTRASONIC TRANSDUCERS;

CAPACITIVE TRANSDUCERS;

STEEL STRUCTURES;

EID: 0036380280     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472561     Document Type: Conference Paper

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