MEMS ultrasonic transducers for the testing of solids

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 50, Issue 3, 2003, Pages 305-311

  Oppenheim, Irving J ^a   Jain, Akash ^a   Greve, David W ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NONDESTRUCTIVE EXAMINATION; PIEZOELECTRIC TRANSDUCERS; SOLIDS;

NONDESTRUCTIVE ULTRASONIC TESTING; STRUCTURAL MONITORING;

ULTRASONIC TRANSDUCERS;

DIAGNOSTIC AGENT;

ARTICLE; AUDITORY STIMULATION; CEMENTATION; ECHOGRAPHY; ELECTRIC CAPACITANCE; ELECTROCHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; QUALITY CONTROL; SENSITIVITY AND SPECIFICITY; THEORETICAL MODEL; TRANSDUCER;

ACOUSTIC STIMULATION; CEMENTATION; ELECTRIC CAPACITANCE; ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MINIATURIZATION; MODELS, THEORETICAL; QUALITY CONTROL; SENSITIVITY AND SPECIFICITY; TRANSDUCERS; ULTRASONOGRAPHY;

EID: 0038549109     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2003.1193624     Document Type: Article

References (10)

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