SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Coatings Technology

Volumn 165, Issue 3, 2003, Pages 224-231

Comparison between characteristics of radio-frequency sheaths and pulse sheaths with insulating substrates

(2) Dai, Zhong Ling a Wang, You Nian a

a DALIAN UNIVERSITY OF TECHNOLOGY (China)

Author keywords

Fluid model; Pulse; Radio frequency; Sheath

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC POTENTIAL; ELECTRODES; EQUIVALENT CIRCUITS; ETCHING; PULSE MODULATION; SUBSTRATES;

RADIO FREQUENCY SHEATHS;

INSULATING MATERIALS;

CIRCUIT; FLUID MECHANICS; FREQUENCY; INSULATION; MODEL; PULSE GENERATOR;

EID: 0037450370 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00734-X Document Type: Article

Times cited : (11)

References (26)

1
- 0001727526
- A. Metze, D.W. Ernie, H.J. Oskam, J. Appl. Phys. 60 (1986) 3081.
- (1986) J. Appl. Phys. , vol.60 , pp. 3081
- Metze, A.¹ Ernie, D.W.² Oskam, H.J.³

2
- 0024131141
- M.A. Lieberman, IEEE Trans. Plasma Sci. 16 (1988) 638.
- (1988) IEEE Trans. Plasma Sci. , vol.16 , pp. 638
- Lieberman, M.A.¹

3
- 84939708572
- M.A. Lieberman, IEEE Trans. Plasma Sci. 17 (1989) 338.
- (1989) IEEE Trans. Plasma Sci. , vol.17 , pp. 338
- Lieberman, M.A.¹

4
- 0001027394
- V.A. Godyak, N. Sternberg, Phys. Rev. A 42 (1990) 2299.
- (1990) Phys. Rev. A , vol.42 , pp. 2299
- Godyak, V.A.¹ Sternberg, N.²

5
- 0000346057
- N. Sternberg, V.A. Godyak, J. Comput. Phys. 111 (1994) 347.
- (1994) J. Comput. Phys. , vol.111 , pp. 347
- Sternberg, N.¹ Godyak, V.A.²

6
- 0031185678
- M.A. Sobolewski, Phys. Rev. E 56 (1997) 1001.
- (1997) Phys. Rev. E , vol.56 , pp. 1001
- Sobolewski, M.A.¹

7
- 0001613578
- J. Gierling, K.U. Riemann, J. Appl. Phys. 83 (1998) 3521.
- (1998) J. Appl. Phys. , vol.83 , pp. 3521
- Gierling, J.¹ Riemann, K.U.²

8
- 36549099890
- K.U. Riemann, J. Appl. Phys. 65 (1989) 999.
- (1989) J. Appl. Phys. , vol.65 , pp. 999
- Riemann, K.U.¹

9
- 0008284330
- E.A. Edelberg, E.S. Aydil, J. Appl. Phys. 86 (1999) 4799.
- (1999) J. Appl. Phys. , vol.86 , pp. 4799
- Edelberg, E.A.¹ Aydil, E.S.²

10
- 0001290374
- P.A. Miller, M.E. Riley, J. Appl. Phys. 82 (1997) 3689.
- (1997) J. Appl. Phys. , vol.82 , pp. 3689
- Miller, P.A.¹ Riley, M.E.²

11
- 0001225044
- T. Panagopoulos, D.J. Economou, J. Appl. Phys. 85 (1999) 3435.
- (1999) J. Appl. Phys. , vol.85 , pp. 3435
- Panagopoulos, T.¹ Economou, D.J.²

12
- 0001351475
- D. Bose, T.R. Govindan, M. Meyyappan, J. Appl. Phys. 87 (2000) 7176.
- (2000) J. Appl. Phys. , vol.87 , pp. 7176
- Bose, D.¹ Govindan, T.R.² Meyyappan, M.³

13
- 0034504611
- M.A. Sobolewski, Phys. Rev. E 62 (2000) 8540.
- (2000) Phys. Rev. E , vol.62 , pp. 8540
- Sobolewski, M.A.¹

14
- 41349106343
- Z.L. Dai, Y.N. Wang, T.C. Ma, Phys. Rev. E 65 (2002) 036403-7.
- (2002) Phys. Rev. E , vol.65 , pp. 036403-036407
- Dai, Z.L.¹ Wang, Y.N.² Ma, T.C.³

15
- 0033436158
- E.V. Barnat, T.-M. Lu, J. Vac. Sci. Technol. A 17 (1999) 3322.
- (1999) J. Vac. Sci. Technol. A , vol.17 , pp. 3322
- Barnat, E.V.¹ Lu, T.-M.²

16
- 0035890374
- E.V. Barnat, T.-M. Lu, J. Little, J. Appl. Phys. 90 (2001) 4946.
- (2001) J. Appl. Phys. , vol.90 , pp. 4946
- Barnat, E.V.¹ Lu, T.-M.² Little, J.³

17
- 0035894264
- E.V. Barnat, T.-M. Lu, J. Appl. Phys. 90 (2001) 5898.
- (2001) J. Appl. Phys. , vol.90 , pp. 5898
- Barnat, E.V.¹ Lu, T.-M.²

18
- 2142778955
- M.A. Lieberman, J. Appl. Phys. 66 (1989) 2926.
- (1989) J. Appl. Phys. , vol.66 , pp. 2926
- Lieberman, M.A.¹

19
- 0000179593
- R.A. Stewart, M.A. Lieberman, J. Appl. Phys. 70 (1991) 3481.
- (1991) J. Appl. Phys. , vol.70 , pp. 3481
- Stewart, R.A.¹ Lieberman, M.A.²

20
- 4043180062
- S. Qin, Z. Jin, C. Chan, J. Appl. Phys. 78 (1995) 55.
- (1995) J. Appl. Phys. , vol.78 , pp. 55
- Qin, S.¹ Jin, Z.² Chan, C.³

21
- 0001585354
- S. Masamune, K. Yukimura, Rev. Sci. Instrum. 71 (2000) 1187.
- (2000) Rev. Sci. Instrum. , vol.71 , pp. 1187
- Masamune, S.¹ Yukimura, K.²

22
- 0034299767
- S. Qi, M. Xinxin, X. Lifang, Nucl. Instr. Meth. Phys. Res. B 170 (2000) 397.
- (2000) Nucl. Instr. Meth. Phys. Res. B , vol.170 , pp. 397
- Qi, S.¹ Xinxin, M.² Lifang, X.³

23
- 0037081125
- A. Liu, X. Wang, B. Tang, Surf. Coat. Technol. 149 (2002) 114.
- (2002) Surf. Coat. Technol. , vol.149 , pp. 114
- Liu, A.¹ Wang, X.² Tang, B.³

24
- 0000140584
- M. Paulus, L. Stals, U. Rude, B. Rauschenbach, J. Appl. Phys. 85 (1999) 761.
- (1999) J. Appl. Phys. , vol.85 , pp. 761
- Paulus, M.¹ Stals, L.² Rude, U.³ Rauschenbach, B.⁴

25
- 0012820652
- in press
- Z.L. Dai, Y.N. Wang, J. Appl. Phys., 92 (2002) in press.
- (2002) J. Appl. Phys. , vol.92
- Dai, Z.L.¹ Wang, Y.N.²

26
- 33645107467
- K.U. Riemann, Phys. Fluids B 3 (1992) 2693.
- (1992) Phys. Fluids B , vol.3 , pp. 2693
- Riemann, K.U.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.