Effect of pulse waveform on plasma sheath expansion in plasma-based ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 170, Issue 3, 2000, Pages 397-405

  Qi, Sun ^a   Xinxin, Ma ^a   Lifang, Xia ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FLUID DYNAMICS; ION IMPLANTATION; MATHEMATICAL MODELS; WAVEFORM ANALYSIS;

PLASMA-BASED ION IMPLANTATION (PBII);

PLASMA SHEATHS;

EID: 0034299767     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00240-8     Document Type: Article

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