Improve retained dose and impact energy of inner surface plasma immersion ion implantation using long pulse duration with deflecting electric field

Surface and Coatings Technology

Volumn 149, Issue 2-3, 2002, Pages 114-118

  Liu, A ^a   Wang, X ^a   Tang, B ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Deflecting electric field; Fluid model; Inner surface implantation; Plasma immersion ion implantation

Indexed keywords

DOSIMETRY; ELECTRIC FIELD EFFECTS; PLASMAS; SURFACE TREATMENT;

PLASMA IMMERSION ION IMPLANTATION (PIII);

ION IMPLANTATION;

COATING; ELECTRIC FIELD;

EID: 0037081125     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01494-3     Document Type: Article

References (6)