Two-dimensional simulation of plasma-based ion implantation

Journal of Applied Physics

Volumn 85, Issue 2, 1999, Pages 761-766

  Paulus, M ^a   Stals, L ^b   Rude U ^c   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b University of Bath   (United Kingdom)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000140584     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369157     Document Type: Article

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