Analysis of thickness dependence of the sensitivity in thin film resistive gas sensors

Sensors and Actuators, B: Chemical

Volumn 89, Issue 3, 2003, Pages 256-261

  Hossein Babaei, Faramarz ^a,b   Orvatinia, Mohammad ^a  

^a K N TOOSI UNIVERSITY OF TECHNOLOGY   (Iran)

^b Canadian High Temperature Research Ltd   (Canada)

Author keywords

Inhomogeneous thin films; Resistive gas sensors; Sensitivity; SnO2; Thickness dependence

Indexed keywords

DEPOSITION; GRAIN BOUNDARIES; POLYCRYSTALLINE MATERIALS; POROUS MATERIALS; SEMICONDUCTING FILMS; THIN FILMS;

TARGET GAS (TG);

CHEMICAL SENSORS;

EID: 0037374738     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00472-0     Document Type: Article

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