Investigation and control of microcracks in tin oxide gas sensing thin-films

Sensors and Actuators, B: Chemical

Volumn 79, Issue 1, 2001, Pages 39-47

  Tang, Zhenan ^a   Chan, Philip C H ^b   Sharma, Rajnish K ^b   Yan, Guizhen ^c   Hsing, I Ming ^b   Sin, Johnny K O ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

^c PEKING UNIVERSITY   (China)

Author keywords

Microcracks; Thin film; Tin oxide

Indexed keywords

AMORPHOUS SILICON; ANNEALING; COPPER; CRACK PROPAGATION; DOPING (ADDITIVES); MICROCRACKS; PHOSPHORUS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; THIN FILMS; TIN COMPOUNDS;

SHORT-CIRCUITING PATHWAY MODELS;

CHEMICAL SENSORS;

EID: 0035949824     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00846-2     Document Type: Article

References (23)

1. 2 sensors: Current statue and future prospects
2. High temperature cracking of tungsten polycide films on quartz substrate
3. Tin dioxide sensors - Development and applications
4. 2 on a silicon substrate
5. Role of short-circuiting pathway in reduced ZnO varistors
6. 2
7. Theory and experiments on rf sputtered tin oxide thin-films for gas sensing applications
8. Thermal analysis and design of a micro-hotplate for integrated gas sensor applications
9. A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering
10. 2 ultrafine particles by additives
11. Reduction of electromigration in aluminum film by copper-doping
12. Copper-doping-level effect on sensitivity and selectivity of tin oxide thin-film gas sensor
13. 2S
14. 2-Pt thin-film with silicon integrated circuit processing
15. 2 on sapphire by reactive sputter deposition
16. Surface roughness of pyrolytic tin dioxide films evaluated by different methods
17. Morphology and phase of tin oxide thin-films during their growth from the metallic tin
18. Roughness effects on the thermal stability of thin-films
19. Physical and chemical aspects of oxidic semiconductor gas sensors