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Volumn 73, Issue 1, 2001, Pages 27-34

PECVD prepared SnO2 thin films for ethanol sensors

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ETHANOL; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

EID: 0034825226     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00603-1     Document Type: Article
Times cited : (125)

References (20)
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    • Prague, Czech Republic, 2-6 August
    • N. Bauduin, F. Hellegouarc'H, R. Planade, J. Amouroux, F. Arefi-Khonsari, Deposition of transparent conductive tin oxide thin films by PECVD for sensor applications, in: Proceedings of the ISPC 14, Vol. IV, Prague, Czech Republic, 2-6 August 1999, pp. 1457-1468.
    • (1999) Proceedings of the ISPC 14 , vol.4 , pp. 1457-1468
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    • Doping effect of SnO on gas sensing characteristics of sputtered ZnO thin film chemical sensors
    • H. Habara, K. Kondo, Y. Douguchi, T. Minami, Doping effect of SnO on gas sensing characteristics of sputtered ZnO thin film chemical sensors, Sens. Actuators B35-36 (1996) 384-387.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.