A study on thin film gas sensor based on SnO2 prepared by pulsed laser deposition method

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 463-467

  Kim, C K ^a   Choi, S M ^a   Noh, I H ^a   Lee, J H ^a   Hong, C ^a   Chae, H B ^a   Jang, G E ^b   Park, H D ^c  

^a Soonchunhyang University   (South Korea)

^b Chungbuk National University   (South Korea)

^c Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

MEMS; Microsensor; Nd:YAG laser; PLD; SnO2

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM PREPARATION; MICROELECTROMECHANICAL DEVICES; PULSED LASER DEPOSITION; SOLID STATE LASERS; THIN FILM DEVICES; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

TIN DIOXIDE;

CHEMICAL SENSORS;

EID: 0035875729     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00726-2     Document Type: Article

References (5)

1. Gas sensing properties of nanocrystalline metal oxide powders produced by a laser evaporation technique
2. 2 thin films used in chemisorption sensors by pulsed laser reactive ablation
3. 3 composition
4. Hydrogen-free amorphous carbon films: Correlation between growth conditions and properties