New gas sensing mechanism for SnO2 thin-film gas sensors fabricated by using dual ion beam sputtering

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 200-208

  Choe, Yong Sahm ^a  

^a Materials Research Laboratory   (South Korea)

Author keywords

Debye length; Dual ion beam sputtering; Gas sensing mechanism; Semiconductor gas sensor; SnO2 thin film

Indexed keywords

FILM PREPARATION; MATHEMATICAL MODELS; MICROSTRUCTURE; SENSITIVITY ANALYSIS; SPUTTERING; STOICHIOMETRY; THIN FILM DEVICES; TIN COMPOUNDS;

DEBYE LENGTH; DUAL ION BEAM SPUTTERING;

CHEMICAL SENSORS;

EID: 0035876031     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00731-6     Document Type: Article

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