Comparison study of SnO2 thin- and thick-film gas sensors

Sensors and Actuators, B: Chemical

Volumn 67, Issue 1, 2000, Pages 122-127

  Lee, Sang Woo ^a   Tsai, Ping Ping ^b   Chen, Haydn ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; FILM PREPARATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; MORPHOLOGY; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; THICK FILM DEVICES; THIN FILM DEVICES; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

METAL ORGANIC DECOMPOSITION; REPRODUCIBILITY; TETRAETHYLTIN;

CHEMICAL SENSORS;

EID: 0034245852     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00390-7     Document Type: Article

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