Real time in situ monitoring of stacked InAs/InP quantum dots by spectral reflectance

Journal of Crystal Growth

Volumn 248, Issue SUPPL., 2003, Pages 201-205

  Park, Kwangmin ^a   Hwang, Heedon ^a   Kang, Jong Hoon ^a   Yoon, Sukho ^a   Kim, Yong Dong ^b   Yoon, Euijoon ^a  

^a Seoul National University   (South Korea)

^b Kyung Hee University   (South Korea)

Author keywords

A1. Atomic force microscopy; A1. In situ monitoring; A1. Spectral reflectance; A3. Metalorganic chemical vapor deposition; B1. Indium arsenide; B1. Indium phosphide

Indexed keywords

ATOMIC FORCE MICROSCOPY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; REAL TIME SYSTEMS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR GROWTH;

SPECTRAL REFLECTANCE;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0037291740     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)01839-0     Document Type: Conference Paper

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