Real-time monitoring of ellipsometry monolayer oscillations during metalorganic vapor-phase epitaxy

Journal of Crystal Growth

Volumn 221, Issue 1-4, 2000, Pages 111-116

  Lee, Jeong Sik ^a   Masumoto, Yasuaki ^a  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CORRELATION METHODS; ELLIPSOMETRY; METALLORGANIC VAPOR PHASE EPITAXY; MONOLAYERS; OSCILLATIONS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS;

LAYER-BY-LAYER GROWTH; MONOLAYER OSCILLATIONS;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0034504514     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00663-1     Document Type: Article

References (18)

1. Aspnes D.E. Surf. Sci. 307:1994;1017.
2. Kamiya I., Aspnes D.E., Tanaka H., Florez L.T., Harbison J.P., Bhat R. Phys. Rev. Lett. 68:1992;627.
3. Makimoto T., Yamauchi Y., Kobayashi N., Horikoshi Y. Jpn. J. Appl. Phys. 29:1990;L645.
4. Aspnes D.E., Kamiya I., Tanaka H., Bhat R. J. Vac. Sci. Technol. B. 10:1992;1725.
5. Lee J.-S., Sugou S., Ren H.-W., Masumoto Y., Kurihara K. Appl. Surf. Sci. 41:1999;114.
6. Lee J.-S., Sugou S., Ren H.-W., Masumoto Y. J. Vac. Sci. Tech. B. 17:1999;1341.
7. Wassermeier M., Behrend J., Zettler J.-T., Stahrenberg K., Ploog K.H. Appl. Surf. Sci. 107:1996;48.
8. Chen Q., Dapkus P.D. J. Electrochem. Soc. 138:1991;2821.
9. Neave J.H., Joyce B.A., Dobson P.J., Norton N. Appl. Phys. A. 83:1983;1.
10. Sakamoto T., Kawai N.J., Nakagawa T., Ohta K., Kojima T. Appl. Phys. Lett. 47:1985;617.
11. Lee J.-S., Sugou S., Masumoto Y. J. Crystal. Growth. 209:2000;614.
12. Lee J.-S., Sugou S., Masumoto Y. J. Appl. Phys. 88:2000;196.
13. Lee J.-S., Sugou S., Masumoto Y. Jpn. J. Appl. Phys. 38:1999;L614.
14. G.B. Stringfellow, Organometallic Vapor-Phase Epitaxy: Theory and Practice, Academic Press, New York, 1989.
15. Rochow E.G., Hurd D.T., Lewis R.N. The Chemistry of Organometallic Compounds. 1957;8 Wiley, New York.
16. Bohren C.F., Huffman D.B. Absorption and Scattering of Light by Small Particles. 1983;136 Wiley, New York.
17. Snyder C.W., Mansfield J.F., Orr B.G. Phys. Rev. B. 46:1992;9551.
18. Petroff P.M., Denbaas S.P. Superlatt. Microstruct. 15:1994;15.