CVD growth of Si nanocrystals on dielectric surfaces for nanocrystal floating gate memory application

Materials Research Society Symposium - Proceedings

Volumn 638, Issue , 2001, Pages F521-F526

  Madhukar, Sucharita ^a   Smith, K ^a   Muralidhar, R ^a   O'Meara, D ^a   Sadd, M ^a   Nguyen, B Y ^a   White, B ^a   Jones, B ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; DIELECTRIC FILMS; GATES (TRANSISTOR); NUCLEATION; SEMICONDUCTING SILICON; STRAIN; SURFACE CHEMISTRY; SURFACE STRUCTURE; SURFACE TREATMENT; THERMAL EFFECTS;

DIELECTRIC SURFACES;

NANOSTRUCTURED MATERIALS;

EID: 0035558467     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)