Crystalline carbonitride forms harder than the hexagonal Si-carbonitride crystallite

Journal of Physics D: Applied Physics

Volumn 34, Issue 9, 2001, Pages 1430-1435

  Fu, Yongqing ^a   Sun, Chang Q ^a   Du, Hejun ^a   Yan, Bibo ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NITRIDE; CHEMICAL VAPOR DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; FLOW OF FLUIDS; NITROGEN; PLASMA APPLICATIONS; SEMICONDUCTING SILICON; STOICHIOMETRY; SUBSTRATES; TITANIUM ALLOYS; WAVELENGTH DISPERSIVE SPECTROSCOPY; X RAY DIFFRACTION ANALYSIS;

GRAZING INCIDENCE X-RAY DIFFRACTION (GIXRD); MICROWAVE PLASMA CHEMICAL VAPOUR DEPOSITION (MP-CVD);

CRYSTALLINE MATERIALS;

EID: 0035821019     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/9/322     Document Type: Article

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